First several kinds of implementation of si - micromachined transmission line have been investigated . with different fabricating process , each transmission line has its different structure , and the insertion loss and operating frequency range are different . then we determined our objective 在大量文獻(xiàn)調(diào)研的基礎(chǔ)上,對(duì)硅襯底上制備微波傳輸線的方法進(jìn)行了全面分析和總結(jié),結(jié)合現(xiàn)有儀器設(shè)備和加工技術(shù)條件,確定研究目標(biāo)。